MeV He backscattering analysis of ion-implanted Si: Drive-in diffusion and epitaxial regrowth

✍ Scribed by J.W. Mayer; L. Csepregi; J. Gyulai; T. Nagy; G. Mezey; P. Revesz; E. Kotai

• Book ID: 107862254
• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 209 KB
• Volume: 32
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(76)90318-7