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Method for pulsed magnetron deposition of diamondlike films on large-area substrates

✍ Scribed by S. P. Bugaev; K. V. Oskomov; V. G. Podkovyrov; S. V. Smaikina; N. S. Sochugov

Book ID
110544582
Publisher
Springer
Year
1999
Tongue
English
Weight
507 KB
Volume
42
Category
Article
ISSN
1573-9228

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✍ M. Lorenz; H. Hochmuth; H. BΓΆrner; D. Natusch πŸ“‚ Article πŸ“… 1994 πŸ› Elsevier Science 🌐 English βš– 136 KB

An arrangement for large area PLD on 3-inch wafers is proposed. For in-situ deposited YBCO thin films on rplane sapphire with YSZ buffer layer we inductively measured within 3 inch diameter values of the critical temperature Tc(90% ) from 85.9 K to 86.7 K and values of the critical current density j