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Method for Measurement of Magnetostriction Constants in (001) Thin Films Using FMR

✍ Scribed by Půst, L. ;Frait, Z.

Publisher
John Wiley and Sons
Year
1984
Tongue
English
Weight
501 KB
Volume
85
Category
Article
ISSN
0031-8965

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New stress-measurement methods for determining both tensile and compressive stress and Young's modulus in surface micromachining are presented. The investigation is concentrated on the development of two techniques: (1) beam pull-in voltage \(\left(V_{\mathrm{PI}}\right)\) and (2) long beam deflecti