Method for detailed evaluation of yield of Nb Josephson junctions
β Scribed by Kenji Hinode; Yoshihito Hashimoto; Yoshio Kameda; Tetsuro Satoh; Shinichi Yorozu; Shuichi Nagasawa; Mutsuo Hidaka
- Book ID
- 103889714
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 340 KB
- Volume
- 445-448
- Category
- Article
- ISSN
- 0921-4534
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β¦ Synopsis
We have developed a method for evaluating I c (critical current) spreading and yield of Nb Josephson junctions (JJ) through detailed current-voltage (I-V) measurements and applied the method to evaluation of 1000 serial arrays. Digitizing the stepwise I-V curve, we deduced the I c value at each voltage step. This allowed us to easily detect irregularities such as junction shortages or I c s that were larger than those of the main distribution by reducing the resolution limit to 1 JJ. Using this method we can take into account very low frequency (<1%) failures in evaluating fabrication processes.
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