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Metastable effects in silicon thin films: Atmospheric adsorption and light-induced degradation

โœ Scribed by V. Smirnov; S. Reynolds; F. Finger; R. Carius; C. Main


Book ID
116669108
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
120 KB
Volume
352
Category
Article
ISSN
0022-3093

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Hydrogenated amorphous silicon films (a-Si:H) have been deposited by r.f. glow discharge of silane (Sill 4) and hydrogen (H 2) gas mixture. The hydrogen concentration in the gas mixture and the applied r.f. power density have been varied. The initial photoconductivity (crp), photosensitivity (%/~d),