Conduction and field induced degradation in thin ZrO2films sputtered in nitrogen containing plasma on silicon

✍ Scribed by Rao, Ashwath; D’sa, Joyline; Goyal, Saurabh; Singh, B. R.

• Book ID: 121549923
• Publisher: Springer US
• Year: 2014
• Tongue: English
• Weight: 653 KB
• Volume: 25
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1007/s10854-014-1772-y