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Metastable defect states and equilibration temperatures in a-SiNx:H, a-SiOx:H and a-SiCx:H

✍ Scribed by A. Hamed; H. Fritzsche; X.-M. Deng; S. Köhler; R. Gupta

Book ID: 117146990
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 279 KB
Volume: 137-138
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80112-7

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