Metalorganic chemical vapour deposition of zinc oxide from dimethylzinc, water and tetrahydrofuran
โ Scribed by W. Wieldraaijer; J. van Balen Blanken; E.W. Kuipers
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 359 KB
- Volume
- 126
- Category
- Article
- ISSN
- 0022-0248
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๐ SIMILAR VOLUMES
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Thin films of CdS were grown by low-pressure metalorganic chemical vapour deposition (LP-MOCVD, 10 72 Torr) on GaAs(100) and borosilicate glass using the novel single-source precursor bis(diethylmonothiocarbamato)cadmium(II). The deposition of CdS was observed at substrate temperatures of 300 8C and