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Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources

✍ Scribed by Anders, André

Book ID
126957369
Publisher
AVS (American Vacuum Society)
Year
1994
Tongue
English
Weight
789 KB
Volume
12
Category
Article
ISSN
0734-211X

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Metallic film deposition using a vacuum arc plasma source with a refractory anode
✍ Isak I. Beilis; Raymond L. Boxman 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 994 KB

Conventional metallic film deposition techniques are compared with the hot refractory anode vacuum arc (HRAVA) developed in the last decade. In the HRAVA process, the anode is heated by the arc, and a dense plasma plume of cathode material is formed by re-evaporation of cathode material from the ano