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Coating deposition using vacuum arc and ablation metal plasma

✍ Scribed by A.I. Ryabchikov; V.M. Matvienko; I.B. Stepanov

Book ID
108278540
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
412 KB
Volume
203
Category
Article
ISSN
0257-8972

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✍ Isak I. Beilis; Raymond L. Boxman πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 994 KB

Conventional metallic film deposition techniques are compared with the hot refractory anode vacuum arc (HRAVA) developed in the last decade. In the HRAVA process, the anode is heated by the arc, and a dense plasma plume of cathode material is formed by re-evaporation of cathode material from the ano