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Metal oxide-semiconductor capacitors on silicon carbide

โœ Scribed by Richard C.A. Harris


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
263 KB
Volume
19
Category
Article
ISSN
0038-1101

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๐Ÿ“œ SIMILAR VOLUMES


Anodic oxide films on silicon carbide
โœ S. K. Lilov ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 104 KB

## Abstract Anodic oxide films were grown on SiC using various electrolytes. The obtained oxide films were compared and some of their electrophysical properties were investigated. Anodic oxidation of SiC was shown to be useful for precise removal of layers as well as for identification of the polar