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Metal doped polymer films prepared by plasma polymerization and their potential applications

โœ Scribed by H. Biederman


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
656 KB
Volume
34
Category
Article
ISSN
0042-207X

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Internal stress in plasma polymer films
โœ Q. S. Yu; H. K. Yasuda ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 229 KB ๐Ÿ‘ 1 views

Thin plasma polymer films were deposited from several liquid monomers (mainly siloxane-type monomers) in a low-temperature cascade arc torch (CAT) reactor. The effects of monomer structures and plasma parameters on internal stress in the films were experimentally studied. By appropriately adjusting