✦ LIBER ✦

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3thin film on titanium substrate

✍ Scribed by Shuhei Matsushita, Isaku Kanno, Kazuhiko Adachi, Ryuji Yokokawa, Hidetoshi Kotera

No coin nor oath required. For personal study only.

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