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Process dependence of the piezoelectric response of membrane actuators based on Pb(Zr0.45Ti0.55)O3 thin films

✍ Scribed by Nguyen, C.T.Q.; Nguyen, M.D.; Dekkers, M.; Houwman, E.; Vu, H.N.; Rijnders, G.

No coin nor oath required. For personal study only.

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