Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of $\hbox{Pb}(\hbox{Zr}, \hbox{Ti})\hbox{O}_{3}$ Thin Films on Titanium Substrates

✍ Scribed by K. Kanda; I. Kanno; H. Kotera; K. Wasa

• Book ID: 126749058
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 398 KB
• Volume: 18
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/JMEMS.2009.2015478