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mesoporous thin films studied by Atmospheric Ellipsometric Porosimetry: A case of contamination

✍ Scribed by O. Dubreuil; J. Dewalque; G. Chêne; F. Mathis; G. Spronck; D. Strivay; R. Cloots; C. Henrist

Book ID
113800138
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
842 KB
Volume
145
Category
Article
ISSN
1387-1811

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## Abstract Powders of copper and aluminium with a maximum grain size of 50 µm are mixed in different ratios. The mixtures are cold isostatically pressed into two‐inch circular targets which are mounted in a conventional magnetron set‐up and used to deposit both metallic Cu–Al as well as oxygen ric