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Mechanism, Products, and Growth Rate of Atomic Layer Deposition of Noble Metals

✍ Scribed by Elliott, Simon D.

Book ID: 121274151
Publisher: American Chemical Society
Year: 2010
Tongue: English
Weight: 635 KB
Volume: 26
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la101207y

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