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Mechanism of microcrystalline silicon growth from silicon tetrafluoride and hydrogen

✍ Scribed by Y. Okada; J. Chen; I.H. Campbell; P.M. Fauchet; S. Wagner

Book ID: 115987189
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 196 KB
Volume: 114
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(89)90730-8

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