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Mechanism of growth of ultrathin SiO2 layers on silicide substrates

✍ Scribed by A. Cros

Book ID: 118986613
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 227 KB
Volume: 162
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(85)90969-0

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