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Mechanism of formation of the response of a hydrogen gas sensor based on a silicon MOS diode

โœ Scribed by V. I. Gaman; V. I. Balyuba; V. Yu. Gritsyk; T. A. Davydova; V. M. Kalygina


Book ID
111443992
Publisher
Springer
Year
2008
Tongue
English
Weight
198 KB
Volume
42
Category
Article
ISSN
1063-7826

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How a limited mass transfer in the gas p
โœ Ulf Ackelid; Lars-Gunnar Petersson ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 753 KB

The hydrogen sensitivity of palladium MOS sensors in an oxygen-containing atmosphere is shown to depend on the area of the Pd film, the rate of the gas flow, the total pressure and the type of carrier gas. All observations can be explained by the influence of a limited mass transfer in the gas phase