Mechanical Stresses in SiO2 of Polycrystalline Si
β Scribed by Ayvazyan, G.E.
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 114 KB
- Volume
- 177
- Category
- Article
- ISSN
- 0031-8965
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π SIMILAR VOLUMES
Si-rich-SiO 2 layers with excess silicon of 45-50% were grown by RF magnetron co-sputtering from pure SiO 2 and Si targets and were studied by Raman scattering, HRTEM, electron-paramagnetic resonance and X-ray diffraction (XRD) methods as well as by photo-voltage technique operated at different temp
The evolution of the intrinsic stress with the annealing temperature in silicon oxide layers thermally grown and deposited by the low-pressure chemical vapour method has been analysed by the reflection-absorption Fourier transform infrared (FT-IR) technique. The results show that the annealing proce