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Mechanical properties of SiNxCxceramic films prepared by plasma CVD

✍ Scribed by M. Moriyama; K. Kamata; I. Tanabe

Publisher: Springer
Year: 1991
Tongue: English
Weight: 706 KB
Volume: 26
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00544467

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