✦ LIBER ✦

Mechanical properties of silicon oxynitride thin films prepared by low energy ion beam assisted deposition

✍ Scribed by Yukari Shima; Hiroki Hasuyama; Toshiharu Kondoh; Yasuo Imaoka; Takanori Watari; Koumei Baba; Ruriko Hatada

No coin nor oath required. For personal study only.

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