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Low grain size TiN thin films obtained by low energy ion beam assisted deposition

✍ Scribed by J.M. López; F.J. Gordillo-Vázquez; O. Böhme; J.M. Albella

Book ID: 108416389
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 544 KB
Volume: 173
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(00)00912-0

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