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Mechanical properties of nitrogen-doped CZ silicon crystals

✍ Scribed by V Orlov; H Richter; A Fischer; J Reif; T Müller; R Wahlich

Book ID: 104420654
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 596 KB
Volume: 5
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00121-x

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