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Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVD

โœ Scribed by Yang, X.D.; Saito, T.; Nakamura, Y.; Kondo, Y.; Ohtake, N.


Book ID
122685911
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
808 KB
Volume
13
Category
Article
ISSN
0925-9635

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