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Deposition of DLC film from adamantane by using pulsed discharge plasma CVD

โœ Scribed by Umeno, M.; Noda, M.; Uchida, H.; Takeuchi, H.


Book ID
121312400
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
487 KB
Volume
17
Category
Article
ISSN
0925-9635

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