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Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films

โœ Scribed by Sharvani Nagappa; Marc Zupan; C.A. Zorman


Book ID
113897487
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
229 KB
Volume
59
Category
Article
ISSN
1359-6462

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