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Mechanical and optical properties of hard SiCN coatings prepared by PECVD

✍ Scribed by P. Jedrzejowski; J. Cizek; A. Amassian; J.E. Klemberg-Sapieha; J. Vlcek; L. Martinu

Book ID
114085715
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
225 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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