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Mechanical and optical characteristics of superhard nanocomposite TiN/a-Si3N4and TiCN/a-SiCN coatings produced by PECVD

✍ Scribed by J. E. Klemberg-Sapieha; P. Jedrzejowski; L. Martinu

Book ID: 111502936
Publisher: Allerton Press, Inc.
Year: 2007
Tongue: English
Weight: 449 KB
Volume: 29
Category: Article
ISSN: 1063-4576
DOI: 10.3103/s1063457607030069

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