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Measurements of the Thermal Conductivity of CVD Diamond Films Using Micromechanical Devices

โœ Scribed by Jansen, E. ;Obermeier, E.

Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
478 KB
Volume
154
Category
Article
ISSN
0031-8965

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The non-destructive and non-contact photothermal beam deflection method has been applied to thin synthetic diamond films to give thermal conductivity measurements. The thickness of the diamond film was 12-50 /zm on silicon and tungsten substrates. The maximum film thermal conductivity value obtained