𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Measurement of thin aluminium layers on silicon

✍ Scribed by Volker Rössiger; Martin Lenk


Publisher
Elsevier Science
Year
1981
Weight
146 KB
Volume
180
Category
Article
ISSN
0029-554X

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Influence of Profile Parameters on the I
✍ Dipl.-Ing. Ch. Quick; Dr. E. Hild; Dr.-Ing. P. Schley; Dr.-Ing. J. Quick 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 323 KB 👁 2 views

For IR thickness measurements of very thin silicon epitaxial layers (dep, < 3 pm) on silicon substrate the influence of the concentration profile of free carriers in the whole system is not negligible. The effects of most important profile parameters on the IR reflectance spectrum of silicon epitaxi