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Measurement of the thickness of natural oxide on a silicon relief step structure

✍ Scribed by Gavrilenko, V. P.; Zablotskii, A. V.; Kuzin, A. A.; Kuzin, A. Yu.; Kuz’min, A. A.; Ermakova, M. A.; Mityukhlyaev, V. B.; Rakov, A. V.; Todua, P. A.; Filippov, M. N.

Book ID: 121616840
Publisher: Springer US
Year: 2013
Tongue: English
Weight: 140 KB
Volume: 56
Category: Article
ISSN: 0543-1972
DOI: 10.1007/s11018-013-0254-6

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