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Measurement of the native oxide thickness on a reference relief pitch structure on a single-crystal silicon substrate

✍ Scribed by V. P. Gavrilenko, A. A. Kuzin, A. Yu. Kuzin, A. A. Kuz’min…


Book ID
120772763
Publisher
Springer
Year
2013
Tongue
English
Weight
971 KB
Volume
42
Category
Article
ISSN
1063-7397

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