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Measurement of the Sheet Resistivity of a Square Wafer with a Square Four‐Point Probe

✍ Scribed by Keywell, Frank; Dorosheski, George

Book ID: 118215098
Publisher: American Institute of Physics
Year: 1960
Tongue: English
Weight: 624 KB
Volume: 31
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.1717065

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