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Ultra-shallow junction (USJ) sheet resistance measurements with a non-penetrating four point probe

✍ Scribed by M.C. Benjamin; R.J. Hillard; J.O. Borland

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 200 KB
Volume: 237
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.05.040

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