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Measurement of the mass attenuation coefficients for SiH4 and Si

✍ Scribed by Wang Da-Chun; Luo Ping-An; Yang Hua


Book ID
113284873
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
535 KB
Volume
95
Category
Article
ISSN
0168-583X

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The limiting uncertainty in recent high accuracy measurements of the mass attenuation coefficient is the measurement of the integrated column density. An improvement in the design of the absorption foil holder is described which reduces the integrated column density uncertainty. The new design allow