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Measurement of the distribution of damage in ion implanted GaAs by differential reflectance spectroscopy

✍ Scribed by P. Kraisingdecha; M. Gal; H.H. Tan; C. Jagadish; J.S. Williams


Book ID
113284901
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
487 KB
Volume
96
Category
Article
ISSN
0168-583X

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