Measurement of electron probe beam diame
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Oho, Eisaku ;Sasaki, Toshihide ;Adachi, Koichi ;Kanaya, Koichi
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Article
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1985
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Wiley (John Wiley & Sons)
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English
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The present report illustrates a computerized method for precise measurement of the diameter of an electron beam. The value of this measurement extends beyond simply providing an accurate estimate of resolution. Other salient areas which will benefit include quantitative X-ray microanalysis, energy