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Measurement process control by means of algorithms based on digital image processing

✍ Scribed by Arpaia, P.; Betta, G.; Langella, A.; Sacco, E.

Book ID
114456994
Publisher
The Institution of Electrical Engineers
Year
1999
Tongue
English
Weight
868 KB
Volume
146
Category
Article
ISSN
1350-2344

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The present report illustrates a computerized method for precise measurement of the diameter of an electron beam. The value of this measurement extends beyond simply providing an accurate estimate of resolution. Other salient areas which will benefit include quantitative X-ray microanalysis, energy