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Measurement of narrow Si dopant distributions in GaAs by SIMS

✍ Scribed by J. B. Clegg; R. B. Beall

Book ID: 104592316
Publisher: John Wiley and Sons
Year: 1989
Tongue: English
Weight: 748 KB
Volume: 14
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.740140607

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