Measurement of MOSFET substrate dopant profile via inversion layer-to-substrate capacitance

✍ Scribed by Chiang, C.Y.-T.; Che Ta Clement Hsu; Yeow, Y.T.; Ghodsi, R.

• Book ID: 114537389
• Publisher: IEEE
• Year: 1998
• Tongue: English
• Weight: 144 KB
• Volume: 45
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.704372