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Measurement of electrical properties of materials under the oxide layer by microwave-AFM probe

✍ Scribed by Lan Zhang, Yang Ju, Atsushi Hosoi, Akifumi Fujimoto

Book ID: 118787742
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 479 KB
Volume: 18
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1512-2

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