Measurement of elastic-stiffness tensor of an anisotropic thin film by electromagnetic acoustic resonance

✍ Scribed by Hirotsugu Ogi; Goh Shimoike; Kazuki Takashima; Masahiko Hirao

• Book ID: 104263479
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 105 KB
• Volume: 40
• Category: Article
• ISSN: 0041-624X
• DOI: 10.1016/s0041-624x(02)00116-6

✦ Synopsis

This paper presents a contactless methodology for determining all independent elastic-stiffness coefficients Cij of a transverse isotropic thin film: C11, C12, C13, C33, and C44. The electromagnetic-acoustic-resonance technique measures the acoustic resonance frequencies of a film-coated specimen with a high accuracy, better than 10(-5), which enables determining the film Cij with the known substrate Cij. The measurement takes two steps. First, through-thickness resonance frequencies of longitudinal and shear modes are measured to determine C33 and C44, and the film thickness. Then, remaining three coefficients are deduced from measurements of the free-vibration resonance frequencies of the layer parallelepiped specimen. Simulations and experiments with monocrystal copper and titanium confirm the reliability of the resultant film Cij within 5%, when the film thickness is more than 0.5% of the substrate.