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Mathematical model of the process of growing single-crystal silicide films on silicon

✍ Scribed by I. V. Medvedev; G. A. Chechko; N. I. Khodakovskii

Publisher: Springer US
Year: 1994
Tongue: English
Weight: 289 KB
Volume: 69
Category: Article
ISSN: 1573-8795
DOI: 10.1007/bf01259272

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