Reactive formation of cobalt silicide on single-crystal silicon under rapid electron beam heating

✍ Scribed by F. Mahmood; H. Ahmed; C. Jeynes; W.P. Gillin

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 709 KB
• Volume: 59
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90168-w