Materials Processing by Cluster Ion Beams: History, Technology, and Applications

✍ Scribed by Isao Yamada (Author)

Publisher: CRC Press
Year: 2015
Leaves: 258
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f

✦ Table of Contents

Ion Beam Technology: Overview and History. History and Milestones of Cluster Beam Development. Development of Cluster Beam Sources for Solid Materials. Gas Cluster Ion Beam Equipment. Cluster Ion-Solid Surface Interaction Kinetics. Cluster Ion Beam Sputtering. Cluster Ion Implantation. Cluster Ion Beam-Assisted Deposition. Applications. Conclusions.

✦ Subjects

Engineering & Technology;Electrical & Electronic Engineering;Electronics;Industrial Electronics;Materials Science;Physical Sciences;Physics;Condensed Matter Physics

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