Ion Beams in Materials Processing and Analysis

✍ Scribed by Bernd Schmidt, Klaus Wetzig (auth.)

• Publisher: Springer-Verlag Wien
• Year: 2013
• Tongue: English
• Leaves: 425
• Edition: 1
• Category: Library

✦ Synopsis

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.

✦ Table of Contents

Front Matter....Pages i-ix
Introduction....Pages 1-5
Ion–Solid Interactions....Pages 7-31
Ion Beam Technology....Pages 33-116
Materials Processing....Pages 117-251
Ion Beam Preparation of Materials....Pages 253-300
Materials Analysis by Ion Beams....Pages 301-376
Special Ion Beam Applications in Materials Analysis Problems....Pages 377-411
Back Matter....Pages 413-418

✦ Subjects

Surfaces and Interfaces, Thin Films;Atomic, Molecular, Optical and Plasma Physics;Surface and Interface Science, Thin Films