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Materials Issues with Thin Film Hydrogen Silsesquioxane Low K Dielectrics

✍ Scribed by Albrecht, M. Grant

Book ID
125510529
Publisher
The Electrochemical Society
Year
1998
Tongue
English
Weight
750 KB
Volume
145
Category
Article
ISSN
0013-4651

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Structural control and properties of low
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## Abstract The precursors of poly(hydrogen silsesquioxane) (PHSSQ) were synthesized from triethoxysilane (TES) through variations in the pH and molar ratio of water to TES (__R__~1~). The molecular structures of the prepared PHSSQ precursors were controlled by the reaction conditions, including th