✦ LIBER ✦
Preparation of siloxane–silsesquioxane hybrid thin films for large-scale-integration interlayer dielectrics with excellent mechanical properties and low dielectric constants
✍ Scribed by Jin-Heong Yim; Yi-Yeol Lyu; Hyun-Dam Jeong; Sang Kook Mah; Jingyu Hyeon-Lee; Jun-Hee Hahn; Gwang Seok Kim; Seok Chang; Jae-Geun Park
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 138 KB
- Volume
- 90
- Category
- Article
- ISSN
- 0021-8995
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